New Yield-Aware Mask Strategies

نویسندگان

  • Kwangok Jeong
  • Andrew B. Kahng
  • Christopher J. Progler
چکیده

In this paper, we provide new yield-aware mask strategies to mitigate emerging variability and defectivity challenges. To address variability, we analyze CD variability with respect to reticle size, and its impact on parametric yield. With a cost model that incorporates mask, wafer, and processing cost considering throughput, yield, and manufacturing volume, we assess various reticle strategies (e.g., single layer reticle (SLR), multiple layer reticle (MLR), and small and large size) considering field-size dependent parametric yield. To address defectivity, we compare parametric yield due to EUV mask blank defects for various reticle strategies in conjunction with reticle floorplan optimizations such as shifting of the mask pattern within a mask blank to avoid defects being superposed by performance-critical patterns of a design.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Cost-driven mask strategies considering parametric yield, defectivity, and production volume

We provide new yield-aware mask strategies to mitigate emerging variability and defectivity challenges. To address variability, we analyze critical dimension variability with respect to reticle size and its impact on parametric yield. With a cost model that incorporates mask, wafer, and processing cost, considering throughput, yield, and manufacturing volume, we assess various reticle strategie...

متن کامل

Reticle Floorplanning with Guaranteed Yield for Multi-Project Wafers

With the dramatic increase in mask costs, multi-project wafers have became an attractive choice for low-volume chip fabrication. By using the same set of masks to fabricate a number of different chips, the mask-set cost is amortized among different chip providers, leading to significant cost reduction especially for chip prototyping. In this paper we present a new algorithm for reticle floorpla...

متن کامل

Production of a Dynamic Cropland Mask by Processing Remote Sensing Image Series at High Temporal and Spatial Resolutions

The exploitation of new high revisit frequency satellite observations is an important opportunity for agricultural applications. The Sentinel-2 for Agriculture project S2Agri (http://www.esa-sen2agri.org/SitePages/Home.aspx) is designed to develop, demonstrate and facilitate the Sentinel-2 time series contribution to the satellite EO component of agriculture monitoring for many agricultural sys...

متن کامل

Shape-aware Instance Segmentation

We address the problem of instance-level semantic segmentation, which aims at jointly detecting, segmenting and classifying every individual object in an image. In this context, existing methods typically propose candidate objects, usually as bounding boxes, and directly predict a binary mask within each such proposal. As a consequence, they cannot recover from errors in the object candidate ge...

متن کامل

Mask-cost-aware ECO routing∗

In this paper, we study a mask-cost-aware routing problem for engineering change order (ECO). By taking into account old routes for possible reuse, we present an approach for the problem. Encouraging experimental results are reported to demonstrate the effectiveness of our approach.

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2011